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SILICON TETRAFLUORIDE

2.3 - Poisonous gas 8 - Corrosive
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The Chemical Identifier fields include common identification numbers, the NFPA diamond U.S. Department of Transportation hazard labels, and a general description of the chemical. The information in CAMEO Chemicals comes from a variety of data sources.
CAS Number UN/NA Number
  • 7783-61-1   (SILICON TETRAFLUORIDE)
DOT Hazard Label USCG CHRIS Code
  • Poison Gas
  • Corrosive
none
NIOSH Pocket Guide International Chem Safety Card
none
NFPA 704
Diamond Hazard Value Description
0
3 2
W
Blue Health 3 Can cause serious or permanent injury.
Red Flammability 0 Will not burn under typical fire conditions.
Yellow Instability 2 Readily undergoes violent chemical changes at elevated temperatures and pressures.
White Special W Reacts violently or explosively with water.
(NFPA, 2010)
General Description
A colorless, nonflammable, corrosive and toxic gas with a pungent odor similar to that of hydrochloric acid. Very toxic by inhalation. Vapor is heavier than air. Under prolonged exposure to heat the containers may rupture violently and rocket.

The Hazard fields include special hazard alerts air and water reactions, fire hazards, health hazards, a reactivity profile, and details about reactive groups assignments and potentially incompatible absorbents. The information in CAMEO Chemicals comes from a variety of data sources.
Reactivity Alerts
  • Water-Reactive
  • Air-Reactive
Air & Water Reactions
Fumes in air. Decomposed exothermically by water or moisture in the air to hydrofluoric acid and silicic acid [Merck 11th ed. 1989; Handling Chemicals Safely 1980 p. 821].
Fire Hazard
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

Some may burn but none ignite readily. Vapors from liquefied gas are initially heavier than air and spread along ground. Some of these materials may react violently with water. Cylinders exposed to fire may vent and release toxic and/or corrosive gas through pressure relief devices. Containers may explode when heated. Ruptured cylinders may rocket. For UN1005: Anhydrous ammonia, at high concentrations in confined spaces, presents a flammability risk if a source of ignition is introduced. (ERG, 2024)
Health Hazard
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

TOXIC and/or CORROSIVE; may be fatal if inhaled, ingested or absorbed through skin. Vapors are extremely irritating and corrosive. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control or dilution water may cause environmental contamination. (ERG, 2024)
Reactivity Profile
When heated to decomposition SILICON TETRAFLUORIDE emits toxic fluoride fumes [Lewis, 3rd ed., 1993, p. 1138]. Reacts violently with alcohols to form HF. Attacks many metals in the presence of moisture. Reacts violently to explosively with lithium nitride [Porritt, L. J., Chem. Brit., 1979, 15, p. 282]. Mixtures with sodium are shock-sensitive explosives [Leleu, Cahiers, 1975, (79), p. 270].
Belongs to the Following Reactive Group(s)
Potentially Incompatible Absorbents

Use caution: Liquids with this reactive group classification have been known to react with the absorbents listed below. More info about absorbents, including situations to watch out for...

  • Mineral-Based & Clay-Based Absorbents
  • Sand
  • Dirt/Earth

The Response Recommendation fields include isolation and evacuation distances, as well as recommendations for firefighting, non-fire response, protective clothing, and first aid. The information in CAMEO Chemicals comes from a variety of data sources.
Isolation and Evacuation
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

IMMEDIATE PRECAUTIONARY MEASURE: Isolate spill or leak area for at least 100 meters (330 feet) in all directions.

SPILL: See ERG Table 1 - Initial Isolation and Protective Action Distances on the UN/NA 1859 datasheet.

FIRE: If tank, rail tank car or highway tank is involved in a fire, ISOLATE for 1600 meters (1 mile) in all directions; also, consider initial evacuation for 1600 meters (1 mile) in all directions. (ERG, 2024)
Firefighting
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

SMALL FIRE: Dry chemical or CO2.

LARGE FIRE: Water spray, fog or regular foam. If it can be done safely, move undamaged containers away from the area around the fire. Do not get water inside containers. Damaged cylinders should be handled only by specialists.

FIRE INVOLVING TANKS: Fight fire from maximum distance or use unmanned master stream devices or monitor nozzles. Cool containers with flooding quantities of water until well after fire is out. Do not direct water at source of leak or safety devices; icing may occur. Withdraw immediately in case of rising sound from venting safety devices or discoloration of tank. ALWAYS stay away from tanks in direct contact with flames. (ERG, 2024)
Non-Fire Response
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

Do not touch or walk through spilled material. Stop leak if you can do it without risk. If possible, turn leaking containers so that gas escapes rather than liquid. Prevent entry into waterways, sewers, basements or confined areas. Do not direct water at spill or source of leak. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Isolate area until gas has dispersed. (ERG, 2024)
Protective Clothing
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

Wear positive pressure self-contained breathing apparatus (SCBA). Wear chemical protective clothing that is specifically recommended by the manufacturer when there is NO RISK OF FIRE. Structural firefighters' protective clothing provides thermal protection but only limited chemical protection. (ERG, 2024)
DuPont Tychem® Suit Fabrics
No information available.
First Aid
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

Refer to the "General First Aid" section. Specific First Aid: In case of contact with liquefied gas, only medical personnel should attempt thawing frosted parts. In case of skin contact with hydrogen fluoride, anhydrous (UN1052), if calcium gluconate gel is available, rinse 5 minutes, then apply gel. Otherwise, continue rinsing until medical treatment is available. (ERG, 2024)

The Physical Property fields include properties such as vapor pressure and boiling point, as well as explosive limits and toxic exposure thresholds The information in CAMEO Chemicals comes from a variety of data sources.

Note: For Vapor Density and Specific Gravity, comparing the value to 1.0 can tell you if the chemical will likely sink/rise in air or sink/float in fresh water (respectively). Short phrases have been added to those values below as an aid. However, make sure to also consider the circumstances of a release. The Vapor Density comparisons are only valid when the gas escaping is at the same temperature as the surrounding air itself. If the chemical is escaping from a container where it was pressurized or refrigerated, it may first escape and behave as a heavy gas and sink in the air (even if it has a Vapor Density value less than 1). Also, the Specific Gravity comparisons are for fresh water (density 1.0 g/mL). If your spill is in salt water (density about 1.027 g/mL), you need to adjust the point of comparison. There are some chemicals that will sink in fresh water and float in salt water.
Chemical Formula:
  • SiF4
Flash Point: data unavailable
Lower Explosive Limit (LEL): data unavailable
Upper Explosive Limit (UEL): data unavailable
Autoignition Temperature: data unavailable
Melting Point: data unavailable
Vapor Pressure: data unavailable
Vapor Density (Relative to Air): data unavailable
Specific Gravity: data unavailable
Boiling Point: data unavailable
Molecular Weight: 104.079
Water Solubility: data unavailable
Ionization Energy/Potential: data unavailable
IDLH: data unavailable

AEGLs (Acute Exposure Guideline Levels)

Interim AEGLs for Silicon tetrafluoride (7783-61-1)
Exposure Period AEGL-1 AEGL-2 AEGL-3
10 minutes 0.05 ppm 6.3 ppm 19 ppm
30 minutes 0.05 ppm 4.3 ppm 13 ppm
60 minutes 0.05 ppm 3.3 ppm 10 ppm
4 hours 0.05 ppm 0.87 ppm 2.6 ppm
8 hours 0.05 ppm 0.43 ppm 1.3 ppm
(NAC/NRC, 2024)

ERPGs (Emergency Response Planning Guidelines)

No ERPG information available.

PACs (Protective Action Criteria)

Chemical PAC-1 PAC-2 PAC-3
Silicon tetrafluoride; (Tetrafluorosilane) (7783-61-1) 0.05 ppm 3.3 ppm 10 ppm
(DOE, 2024)

The Regulatory Information fields include information from the U.S. Environmental Protection Agency's Title III Consolidated List of Lists, the U.S. Cybersecurity and Infrastructure Security Agency's Chemical Facility Anti-Terrorism Standards, and the U.S. Occupational Safety and Health Administration's Process Safety Management of Highly Hazardous Chemicals Standard List (see more about these data sources).

EPA Consolidated List of Lists

No regulatory information available.

CISA Chemical Facility Anti-Terrorism Standards (CFATS)

RELEASE THEFT SABOTAGE
Chemical of Interest CAS Number Min Conc STQ Security
Issue
Min Conc STQ Security
Issue
Min Conc STQ Security
Issue
Silicon tetrafluoride 7783-61-1 15.00 % 45 pounds WME

(CISA, 2007)

OSHA Process Safety Management (PSM) Standard List

No regulatory information available.

This section provides a listing of alternate names for this chemical, including trade names and synonyms.
  • PERFLUOROSILANE
  • SILICON FLUORIDE
  • SILICON FLUORIDE (SIF4)
  • SILICON TETRAFLUORIDE
  • SILICON TETRAFLUORIDE, COMPRESSED
  • TETRAFLUOROSILANE

Version 3.1.0