Get the app in the App Store and on Google Play!

ETHYLTRICHLOROSILANE

3 - Flammable liquid 8 - Corrosive
Add to MyChemicals

The Chemical Identifier fields include common identification numbers, the NFPA diamond U.S. Department of Transportation hazard labels, and a general description of the chemical. The information in CAMEO Chemicals comes from a variety of data sources.
CAS Number UN/NA Number
  • 115-21-9   (ETHYLTRICHLOROSILANE)
DOT Hazard Label USCG CHRIS Code
  • Flammable Liquid
  • Corrosive
NIOSH Pocket Guide International Chem Safety Card
none none
NFPA 704
Diamond Hazard Value Description
3
3 2
W
Blue Health 3 Can cause serious or permanent injury.
Red Flammability 3 Can be ignited under almost all ambient temperature conditions.
Yellow Instability 2 Readily undergoes violent chemical changes at elevated temperatures and pressures.
White Special W Reacts violently or explosively with water.
(NFPA, 2010)
General Description
A colorless fuming liquid with a pungent odor. Flash point 57°F. Boiling point 211.1°F (99.5°C). Vapor and liquid may cause burns. Denser than water. Vapors heavier than air.

The Hazard fields include special hazard alerts air and water reactions, fire hazards, health hazards, a reactivity profile, and details about reactive groups assignments and potentially incompatible absorbents. The information in CAMEO Chemicals comes from a variety of data sources.
Reactivity Alerts
  • Highly Flammable
  • Water-Reactive
  • Air-Reactive
Air & Water Reactions
Highly flammable. Reacts violently with water, steam, moist air, alcohols, acetone, light metals with generation of heat and combustible (H2) and corrosive (HCl) gases. On contact with moist air it gives off HCl gas. [Handling Chemicals Safely 1980. p. 924]. It is readily hydrolyzed with the liberation of hydrogen chloride [Hawleys].

Ethyltrichlorosilane reacts vigorously with water to generate gaseous HCl. Based on a scenario where the chemical is spilled into an excess of water (at least 5 fold excess of water), half of the maximum theoretical yield of Hydrogen Chloride gas will be created in 0.45 minutes. After mixing particular chemicals into water, there may be a delay of <1-10 minutes before gas generation may be observed. For this chemical, a 5 second induction time was observed. Experimental details are in the following: "Development of the Table of Initial Isolation and Protective Distances for the 2008 Emergency Response Guidebook", ANL/DIS-09-2, D.F. Brown, H.M. Hartmann, W.A. Freeman, and W.D. Haney, Argonne National Laboratory, Argonne, Illinois, June 2009.
Fire Hazard
Trichloroethylsilane may form explosive mixtures with air. Its vapors are heavier than air and may travel a considerable distance to a source of ignition and flash back. Form toxic and corrosive fumes including phosgene when heated to decomposition and hydrochloric acid in presence of water. Will react with water or steam to produce heat and toxic and corrosive fumes. Will react vigorously with oxidizing materials. Unstable, avoid decomposing heat. (EPA, 1998)
Health Hazard
Vapor and liquid cause burns. Do not inhale or expose eyes to vapor. Vapor may damage eyes even if not immediately painful. (EPA, 1998)
Reactivity Profile
Chlorosilanes, such as ETHYLTRICHLOROSILANE, are compounds in which silicon is bonded to from one to four chlorine atoms with other bonds to hydrogen and/or alkyl groups. Chlorosilanes react with water, moist air, or steam to produce heat and toxic, corrosive fumes of hydrogen chloride. They may also produce flammable gaseous H2. They can serve as chlorination agents. Chlorosilanes react vigorously with both organic and inorganic acids and with bases to generate toxic or flammable gases.
Belongs to the Following Reactive Group(s)
Potentially Incompatible Absorbents

Use caution: Liquids with this reactive group classification have been known to react with the absorbents listed below. More info about absorbents, including situations to watch out for...

  • Cellulose-Based Absorbents
  • Mineral-Based & Clay-Based Absorbents
  • Dirt/Earth

The Response Recommendation fields include isolation and evacuation distances, as well as recommendations for firefighting, non-fire response, protective clothing, and first aid. The information in CAMEO Chemicals comes from a variety of data sources.
Isolation and Evacuation
Excerpt from ERG Guide 155 [Substances - Toxic and/or Corrosive (Flammable / Water-Sensitive)]:

IMMEDIATE PRECAUTIONARY MEASURE: Isolate spill or leak area in all directions for at least 50 meters (150 feet) for liquids and at least 25 meters (75 feet) for solids.

SPILL: See ERG Table 1 - Initial Isolation and Protective Action Distances on the UN/NA 1196 datasheet.

FIRE: If tank, rail car or tank truck is involved in a fire, ISOLATE for 800 meters (1/2 mile) in all directions; also, consider initial evacuation for 800 meters (1/2 mile) in all directions. (ERG, 2020)
Firefighting
Enter fire areas with extreme care. Full protective clothing must be worn including self-contained breathing apparatus, rubber gloves, boots, and bands around arms, legs, and waist. No skin surface should be exposed. Isolate for 1/2 mile in all directions if tank car or truck is involved in fire.

(Caution: reacts with water to produce heat and toxic and corrosive fumes.) Use dry chemical, alcohol foam, or carbon dioxide; water may be ineffective, but water should be used to keep fire-exposed containers cool. If a leak or spill has not ignited, use water spray to disperse the vapors and to protect men attempting to stop a leak. Water spray may be used to flush spills away from exposure and to dilute spills to non-flammable mixtures. (EPA, 1998)
Non-Fire Response
Excerpt from ERG Guide 155 [Substances - Toxic and/or Corrosive (Flammable / Water-Sensitive)]:

ELIMINATE all ignition sources (no smoking, flares, sparks or flames) from immediate area. All equipment used when handling the product must be grounded. Do not touch damaged containers or spilled material unless wearing appropriate protective clothing. Stop leak if you can do it without risk. A vapor-suppressing foam may be used to reduce vapors. FOR CHLOROSILANES, use AFFF alcohol-resistant medium-expansion foam to reduce vapors. DO NOT GET WATER on spilled substance or inside containers. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Prevent entry into waterways, sewers, basements or confined areas.

SMALL SPILL: Cover with DRY earth, DRY sand or other non-combustible material followed with plastic sheet to minimize spreading or contact with rain. Use clean, non-sparking tools to collect material and place it into loosely covered plastic containers for later disposal. (ERG, 2020)
Protective Clothing
For emergency situations, wear a positive pressure, pressure-demand, full facepiece self-contained breathing apparatus (SCBA) or pressure- demand supplied air respirator with escape SCBA and a fully-encapsulating, chemical resistant suit. (EPA, 1998)
DuPont Tychem® Suit Fabrics
No information available.
First Aid
Signs and Symptoms of Acute Trichloroethylsilane Exposure: Signs and symptoms of acute ingestion of trichloroethylsilane may be severe, and include increased salivation, intense thirst, difficulty swallowing, chills, pain, and shock. Oral, esophageal, and stomach burns are common. Vomitus generally has a coffee-ground appearance. The potential for circulatory collapse is high following ingestion of trichloroethylsilane. Acute inhalation exposure may result in sneezing, choking, laryngitis, dyspnea (shortness of breath), respiratory tract irritation, and chest pain. Bleeding of nose and gums, ulceration of the nasal and oral mucosa, pulmonary edema, chronic bronchitis, and pneumonia may also occur. Renal toxicity has been observed in animals. If the eyes have come in contact with trichloroethylsilane, then irritation, pain (may be delayed in the case of vapor exposure), swelling, corneal erosion, and blindness may result. Severe burns, pain, shock, and dermatitis (red, inflamed skin) generally follow dermal exposure.

Emergency Life-Support Procedures: Acute exposure to trichloroethylsilane may require decontamination and life support for the victims. Emergency personnel should wear protective clothing appropriate to the type and degree of contamination. Air-purifying or supplied-air respiratory equipment should also be worn, as necessary. Rescue vehicles should carry supplies such as plastic sheeting and disposable plastic bags to assist in preventing spread of contamination.

Inhalation Exposure:
1. Move victims to fresh air. Emergency personnel should avoid self-exposure to trichloroethylsilane.
2. Evaluate vital signs including pulse and respiratory rate, and note any trauma. If no pulse is detected, provide CPR. If not breathing, provide artificial respiration. If breathing is labored, administer oxygen or other respiratory support.
3. Obtain authorization and/or further instructions from the local hospital for administration of an antidote or performance of other invasive procedures.
4. RUSH to a health care facility.

Dermal/Eye Exposure:
1. Remove victims from exposure. Emergency personnel should avoid self- exposure to trichloroethylsilane.
2. Evaluate vital signs including pulse and respiratory rate, and note any trauma. If no pulse is detected, provide CPR. If not breathing, provide artificial respiration. If breathing is labored, administer oxygen or other respiratory support.
3. Remove contaminated clothing as soon as possible.
4. If eye exposure has occurred, eyes must be flushed with lukewarm water for at least 15 minutes.
5. Wash exposed skin areas THOROUGHLY with soap and water.
6. Obtain authorization and/or further instructions from the local hospital for administration of an antidote or performance of other invasive procedures.
7. RUSH to a health care facility.

Ingestion Exposure:
1. Evaluate vital signs including pulse and respiratory rate, and note any trauma. If no pulse is detected, provide CPR. If not breathing, provide artificial respiration. If breathing is labored, administer oxygen or other respiratory support.
2. Rinse mouth with large amounts of water. Victims should not attempt to swallow this water.
3. DO NOT induce vomiting or attempt to neutralize!
4. Obtain authorization and/or further instructions from the local hospital for administration of an antidote or performance of other invasive procedures.
5. Activated charcoal is of no value.
6. Give the victims water or milk: children up to 1 year old, 125 mL (4 oz or 1/2 cup); children 1 to 12 years old, 200 mL (6 oz or 3/4 cup); adults, 250 mL (8 oz or 1 cup). Water or milk should be given only if victims are conscious and alert.
7. RUSH to a health care facility. (EPA, 1998)

The Physical Property fields include properties such as vapor pressure and boiling point, as well as explosive limits and toxic exposure thresholds The information in CAMEO Chemicals comes from a variety of data sources.

Note: For Vapor Density and Specific Gravity, comparing the value to 1.0 can tell you if the chemical will likely sink/rise in air or sink/float in fresh water (respectively). Short phrases have been added to those values below as an aid. However, make sure to also consider the circumstances of a release. The Vapor Density comparisons are only valid when the gas escaping is at the same temperature as the surrounding air itself. If the chemical is escaping from a container where it was pressurized or refrigerated, it may first escape and behave as a heavy gas and sink in the air (even if it has a Vapor Density value less than 1). Also, the Specific Gravity comparisons are for fresh water (density 1.0 g/mL). If your spill is in salt water (density about 1.027 g/mL), you need to adjust the point of comparison. There are some chemicals that will sink in fresh water and float in salt water.
Chemical Formula:
  • C2H5Cl3Si
Flash Point: 72°F (EPA, 1998)
Lower Explosive Limit (LEL): May be ignited under almost all normal temperature conditions. (EPA, 1998)
Upper Explosive Limit (UEL): May be ignited under almost all normal temperature conditions. (EPA, 1998)
Autoignition Temperature: data unavailable
Melting Point: -158°F (EPA, 1998)
Vapor Pressure: data unavailable
Vapor Density (Relative to Air): 5.6 (EPA, 1998) - Heavier than air; will sink
Specific Gravity: 1.2381 at 68°F (EPA, 1998) - Denser than water; will sink
Boiling Point: 208°F at 760 mmHg (EPA, 1998)
Molecular Weight: 163.51 (EPA, 1998)
Water Solubility: data unavailable
Ionization Energy/Potential: data unavailable
IDLH: data unavailable

AEGLs (Acute Exposure Guideline Levels)

Final AEGLs for Ethyltrichlorosilane (115-21-9)
Exposure Period AEGL-1 AEGL-2 AEGL-3
10 minutes 0.6 ppm 33 ppm 210 ppm
30 minutes 0.6 ppm 14 ppm 70 ppm
60 minutes 0.6 ppm 7.3 ppm 33 ppm
4 hours 0.6 ppm 3.7 ppm 8.7 ppm
8 hours 0.6 ppm 3.7 ppm 8.7 ppm
(NAC/NRC, 2023)

ERPGs (Emergency Response Planning Guidelines)

No ERPG information available.

PACs (Protective Action Criteria)

Chemical PAC-1 PAC-2 PAC-3
Ethyl trichlorosilane; (trichloroethylsilane) (115-21-9) 0.6 ppm 7.3 ppm 33 ppm
(DOE, 2018)

The Regulatory Information fields include information from the U.S. Environmental Protection Agency's Title III Consolidated List of Lists, the U.S. Cybersecurity and Infrastructure Security Agency's Chemical Facility Anti-Terrorism Standards, and the U.S. Occupational Safety and Health Administration's Process Safety Management of Highly Hazardous Chemicals Standard List (see more about these data sources).

EPA Consolidated List of Lists

Regulatory Name CAS Number/
313 Category Code
EPCRA 302
EHS TPQ
EPCRA 304
EHS RQ
CERCLA RQ EPCRA 313
TRI
RCRA
Code
CAA 112(r)
RMP TQ
Trichloroethylsilane 115-21-9 500 pounds 500 pounds

(EPA List of Lists, 2022)

CISA Chemical Facility Anti-Terrorism Standards (CFATS)

RELEASE THEFT SABOTAGE
Chemical of Interest CAS Number Min Conc STQ Security
Issue
Min Conc STQ Security
Issue
Min Conc STQ Security
Issue
Ethyltrichlorosilane 115-21-9 ACG APA sabotage/ contamination

(CISA, 2007)

OSHA Process Safety Management (PSM) Standard List

No regulatory information available.

This section provides a listing of alternate names for this chemical, including trade names and synonyms.
  • ETHYL SILICON TRICHLORIDE
  • ETHYL TRICHLOROSILANE
  • ETHYLTRICHLOROSILANE
  • LS 120
  • LS 120 (SILANE DERIVATIVE)
  • SIE 4901.0
  • SILANE, ETHYL(TRICHLORO)-
  • SILANE, ETHYLTRICHLORO-
  • SILANE, TRICHLOROETHYL-
  • SILICANE, TRICHLOROETHYL-
  • TRICHLOROETHYL SILANE
  • TRICHLOROETHYL SILICONE
  • TRICHLOROETHYLSILANE
  • TRICHLOROETHYLSILICANE
  • TRICHLOROETHYLSILICON
  • TSL 8226

Version 3.0.0